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Accurate Spectroscopic Ellipsometers for Precise Film Thickness Measurements from HORIBA Jobin Yvon
HORIBA Jobin Yvon is a world’s leading manufacturer of spectroscopic ellipsometers used for accurate film thickness and optical constants measurements.
Spectroscopic ellipsometry is a non-destructive
optical technique used for thin film, surface and interface characterization.
UVISEL

Most accurate and sensitive spectroscopic
ellipsometer from
VUV to NIR
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MM-16

Affordable visible-NIR
Spectroscopic Ellipsometer
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In-situ
Spectroscopic
Ellipsometers

Real time film thickness and optical
properties monitoring.
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Auto
SE
Simple Thin Film Measurement Tool !
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HORIBA Jobin Yvon manufactures the most sensitive and accurate spectroscopic ellipsometers on the market.
Spectroscopic ellipsometry measures film thickness, optical constants (refractive index, extinction coefficient), material composition, optical anisotropy, depolarization factor and more.
The UVISEL, a phase modulated spectroscopic ellipsometer covers a wide spectral range from DUV to NIR.
The MM-16, an affordable spectroscopic ellipsometer covers the visible spectral range and is the only commercially available spectroscopic ellipsometer to measure in less than 2 seconds the full Mueller matrix of your samples.
Spectroscopic ellipsometry characterizes a wide range of materials such as: semiconductors, dielectrics, metals, organics, compounds, alloys, deposited on glass, silicon or flexible substrates.
Due to its versatility, spectroscopic ellipsometry covers a wide range of applications from semiconductors, nanotechnologies, photovoltaic, chemistry, biotechnologies, displays, optical coatings and more…

Spectroscopic Ellipsometer Guide (all our ellipsometers include software and are available in ex-situ or in-situ configurations)
| Model |
Spectral Range |
Angle of Incidence |
Sample Stage |
Spot Size |
| Auto SE |
440 nm - 850 nm |
70° |
XYZ Motorized |
8 spot sizes from > 500 µm to 25 µm with unique MyAutoView |
| MM-16 |
430 nm - 850 nm |
Manual 40° - 90° |
Included |
200 µm - 1 mm |
| UVISEL Vis |
210 nm - 880 nm |
Manual 40° - 90° |
Included |
50 µm - 1 mm |
| UVISEL FUV |
190 nm - 880 nm |
Manual 40° - 90° |
Included |
50 µm - 1 mm |
| UVISEL NIR 2100 |
245 nm - 2100 nm |
Manual 40° - 90° |
Included |
50 µm - 1 mm |
| UVISEL ER |
190 nm - 2100 nm |
Manual 40° - 90° |
Included |
50 µm - 1 mm |
| UVISEL VUV |
142 nm - 880 nm |
Adjustable between 65° - 75° |
Included |
2 * 6 mm |
A full range of accessories is available for all models above:
Automatic
Variable Angles of Incidence
200
mm and 300 mm XY Motorized Stage
R-Theta
Motorized Stage
Temperature
Controlled Stage
Liquid
Cell
Check also our fully automated spectroscopic ellipsometers:
UT
300: Fully automated Spectroscopic Ellipsometer
FF-1000:
Large Area Mapping Spectroscopic Ellipsometer
Visit our other Retail
Spectrometer Divisions
OEM
Components and Systems
Spectrometers
and Monochromators
Raman
Spectrometers
Fluorescence
Spectrometers
Elemental
Analyzer
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