HORIBA Jobin Yvon Inc

Spectroscopic Ellipsometer – Ellipsometry by HORIBA Jobin Yvon

 


 
 
 
 

 

 

Accurate Spectroscopic Ellipsometers for Precise Film Thickness Measurements from HORIBA Jobin Yvon

HORIBA Jobin Yvon is a world’s leading manufacturer of spectroscopic ellipsometers used for accurate film thickness and optical constants measurements.

 

Spectroscopic ellipsometry is a non-destructive optical technique used for thin film, surface and interface characterization.

UVISEL



Most accurate and sensitive spectroscopic
ellipsometer from
VUV to NIR

 

MM-16



Affordable visible-NIR
Spectroscopic Ellipsometer

 

In-situ Spectroscopic
Ellipsometers



Real time film thickness and optical properties monitoring.

 

Auto SE

 


Simple Thin Film Measurement Tool !

HORIBA Jobin Yvon manufactures the most sensitive and accurate spectroscopic ellipsometers on the market. Spectroscopic ellipsometry measures film thickness, optical constants (refractive index, extinction coefficient), material composition, optical anisotropy, depolarization factor and more.

The UVISEL, a phase modulated spectroscopic ellipsometer covers a wide spectral range from DUV to NIR.

The MM-16, an affordable spectroscopic ellipsometer covers the visible spectral range and is the only commercially available spectroscopic ellipsometer to measure in less than 2 seconds the full Mueller matrix of your samples.

Spectroscopic ellipsometry characterizes a wide range of materials such as: semiconductors, dielectrics, metals, organics, compounds, alloys, deposited on glass, silicon or flexible substrates.

Due to its versatility, spectroscopic ellipsometry covers a wide range of applications from semiconductors, nanotechnologies, photovoltaic, chemistry, biotechnologies, displays, optical coatings and more…

Spectroscopic Ellipsometer Guide (all our ellipsometers include software and are available in ex-situ or in-situ configurations)

Model Spectral Range Angle of Incidence Sample Stage Spot Size
Auto SE 440 nm - 850 nm 70° XYZ Motorized 8 spot sizes from > 500 µm to 25 µm with unique MyAutoView
MM-16 430 nm - 850 nm Manual 40° - 90° Included 200 µm - 1 mm
UVISEL Vis 210 nm - 880 nm Manual 40° - 90° Included 50 µm - 1 mm
UVISEL FUV 190 nm - 880 nm Manual 40° - 90° Included 50 µm - 1 mm
UVISEL NIR 2100 245 nm - 2100 nm Manual 40° - 90° Included 50 µm - 1 mm
UVISEL ER 190 nm - 2100 nm Manual 40° - 90° Included 50 µm - 1 mm
UVISEL VUV 142 nm - 880 nm Adjustable between 65° - 75° Included 2 * 6 mm

A full range of accessories is available for all models above:

Automatic Variable Angles of Incidence
200 mm and 300 mm XY Motorized Stage
R-Theta Motorized Stage
Temperature Controlled Stage
Liquid Cell

Check also our fully automated spectroscopic ellipsometers:

UT 300: Fully automated Spectroscopic Ellipsometer
FF-1000: Large Area Mapping Spectroscopic Ellipsometer

Visit our other Retail Spectrometer Divisions

OEM Components and Systems
Spectrometers and Monochromators
Raman Spectrometers
Fluorescence Spectrometers
Elemental Analyzer


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